| Specification | ProcessDescription | Category | SpecLimits |
| M273876 | DESTRUCTIVE PHYSICAL ANALYSIS (DPA), REQUIREMENTS FOR | Miscellaneous | Limits: None |
| M273876/06 | Destructive Physical Analysis (DPA), Requirements for Capacitors | Limits: None | |
| M273876/07 | DESTRUCTIVE PHYSICAL ANALYSIS (DPA) REQUIREMENTS FOR: CONNECTORS AND CONTACTS | Space | Limits: None |
| M273876/08 | DESTRUCTIVE PHYSICAL ANALYSIS (DPA) REQUIREMENTS FOR: MISCELLANEOUS RF DEVICES | Space | Limits: None |
| M273876/09 | Destructive Physical Analysis (DPA), Requirements for Filters | Limits: None | |
| M273876/10 | Destructive Physical Analysis (DPA), Requirements for Magnetic Devices | Limits: None | |
| M273876/11 | Destructive Physical Analysis (DPA), Requirements for Fuses | Limits: None | |
| M273876/12 | Destructive Physical Analysis (DPA), Requirements for Heaters | Limits: None | |
| M273876/13 | Destructive Physical Analysis (DPA), Requirements for Isolators and Circulators | Limits: None | |
| M273876/14 | Destructive Physical Analysis (DPA), Requirements for Power Dividers, Couplers, Mixers, & Similar RF Devices | Limits: None | |
| M273876/17 | Destructive Physical Analysis (DPA), Requirements for Resistors | Limits: None | |
| MIL-STD-1580 | DESTRUCTIVE PHYSICAL ANALYSIS (DPA) FOR ELECTRONIC, ELECTROMAGNETIC, AND ELECTROMECHANICAL | Materials Testing | Limits: None |
| MIL-STD-202 (Method 112) | Leak Test | Limits: MIL-STD-202, Method 112E, test conditions C procedures I, IIIa-c, IV, D, and E (Restricted to pre-inspection for destructive part analysis only). | |
| MIL-STD-750 | TEST METHODS FOR SEMICONDUCTOR DEVICES | Materials Testing | Limits: Method 1018.6 |
| MIL-STD-883 | Test Method Standard Microcircuits | Materials Testing | Limits: Method 1018.10 |