| Specification | ProcessDescription | Category | SpecLimits |
| M273876/01 | Destructive Physical Analysis (DPA), Requirements for Diodes | Limits: None | |
| M273876/02 | Destructive Physical Analysis (DPA), Requirements for Transistors | Limits: None | |
| M273876/03 | Destructive Physical Analysis (DPA), Requirements for Microcircuits | Limits: None | |
| M273876/04 | Destructive Physical Analysis (DPA), Requirements for Hybrids | Limits: None | |
| M273876/05 | Destructive Physical Analysis (DPA), Requirements for Chip Diodes, Transistors & Integrated Circuits | Limits: None | |
| M273876/06 | Destructive Physical Analysis (DPA), Requirements for Capacitors | Limits: None | |
| M273876/08 | DESTRUCTIVE PHYSICAL ANALYSIS (DPA) REQUIREMENTS FOR: MISCELLANEOUS RF DEVICES | Space | Limits: None |
| M273876/09 | Destructive Physical Analysis (DPA), Requirements for Filters | Limits: None | |
| M273876/10 | Destructive Physical Analysis (DPA), Requirements for Magnetic Devices | Limits: None | |
| M273876/11 | Destructive Physical Analysis (DPA), Requirements for Fuses | Limits: None | |
| M273876/12 | Destructive Physical Analysis (DPA), Requirements for Heaters | Limits: None | |
| M273876/13 | Destructive Physical Analysis (DPA), Requirements for Isolators and Circulators | Limits: None | |
| M273876/14 | Destructive Physical Analysis (DPA), Requirements for Power Dividers, Couplers, Mixers, & Similar RF Devices | Limits: None | |
| M273876/15 | Destructive Physical Analysis (DPA), Requirements for Rectifier Assemblies | Limits: None | |
| M273876/16 | Destructive Physical Analysis (DPA), Requirements for Relays | Limits: None | |
| M273876/17 | Destructive Physical Analysis (DPA), Requirements for Resistors | Limits: None | |
| M273876/18 | Destructive Physical Analysis (DPA), Requirements for Switches | Limits: None | |
| M273876/19 | Destructive Physical Analysis (DPA), Requirements for Tuning Screws and Tuning Elements | Limits: None | |
| M273876/20 | Destructive Physical Analysis (DPA), Requirements for Quartz Crystal Units, Monolithic Crystal Filters and Hybrid Type Crystal Oscillators | Limits: None | |
| MIL-STD-750 (Method 1071) | Hermetic Seal Leak Test for Semiconductor Devices | Limits: None |